Electronic Grade Sulfuric Acid Technology
  • 26-04-16 10:06
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Using vapor-phase sulfur trioxide as the starting material for pre-purification treatment, followed by absorption with ultra-pure water to produce electronic grade sulfuric acid. According to technical documentation, product grades can be customized based on customer requirements, covering G3 to G5 grades; however, investment differences between different grades are extremely significant. Electronic grade sulfuric acid is used in chip manufacturing for silicon wafer cleaning and photoresist removal, and is the wet chemical with the highest consumption in wafer fabs. It is recommended that project owners comprehensively evaluate the target grade based on end-user requirements and investment budget. Technical services include process scheme demonstration, process package preparation, basic and detailed engineering design, and production start-up guidance, with a cycle of approximately 6 to 12 months.

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Electronic Grade Sulfuric Acid Technology
以气相法三氧化硫为起始物进行预提纯处理,再经超纯水吸收制得电子级硫酸。据技术档案标注,产品级别可根据客户需求定制,覆盖G3至G5等级,但不同级别间投资差异极大。电子级硫酸在芯片制造中用于硅片清洗和光刻胶去除,是晶圆厂湿化学品中消耗量最大的品种。建议业主根据终端客户需求和投资预算综合评估目标等级。技术服务涵盖工艺方案论证、工艺包编制、基础与详细工程设计及投产指导,周期约6至12个月。
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